✦ LIBER ✦
Chemistry for Positive Pattern Transfer Using Area-Selective Atomic Layer Deposition
✍ Scribed by R. Chen; S. F. Bent
- Publisher
- John Wiley and Sons
- Year
- 2006
- Tongue
- English
- Weight
- 360 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0935-9648
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