✦ LIBER ✦
ChemInform Abstract: The New Cubic Iron-Nitride Phase FeN Prepared by Reactive Magnetron Sputtering.
✍ Scribed by L. RISSANEN; M. NEUBAUER; K. P. LIEB; P. SCHAAF
- Publisher
- John Wiley and Sons
- Year
- 2010
- Weight
- 30 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0931-7597
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✦ Synopsis
of the title compound deposited on Si(110) substrates via reactive magnetron sputtering are investigated as a function of the deposition parameters in order to optimize the purity and structure. The analyses of the typical 200 nm thick films are carried out using ion-beam analysis as well as phase analysis. Samples with about 90% single-phase cubic FeN are achieved. The thermal stability of the films in vacuum, H 2 , and NH 3 up to 723 K is also investigated. - (RISSANEN, L.;