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ChemInform Abstract: Surface Chemistry for Molecular Layer Deposition of Organic and Hybrid Organic—Inorganic Polymers

✍ Scribed by Steven M. George; Byunghoon Yoon; Arrelaine A. Dameron

Publisher
John Wiley and Sons
Year
2009
Weight
15 KB
Volume
40
Category
Article
ISSN
0931-7597

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Molecular Layer Deposition of Hybrid Org
Molecular Layer Deposition of Hybrid Organic-Inorganic Polymer Films using Diethylzinc and Ethylene Glycol
✍ Byunghoon Yoon; Jennifer L. O'Patchen; Dragos Seghete; Andrew S. Cavanagh; Steve 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 651 KB

## Abstract The molecular layer deposition (MLD) of a hybrid organic‐inorganic polymer based on zinc is demonstrated using sequential exposures of diethyl zinc (DEZ, Zn(CH~2~CH~3~)~2~) and ethylene glycol (EG, HOCH~2~CH~2~OH). This polymer is representative of a class of zinc alkoxide polymers with