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ChemInform Abstract: Surface and Interface Roughness of Ultrathin Nitric Oxide Oxynitride Gate Dielectric.

✍ Scribed by R. I. HEGDE; B. MAITI; R. S. RAI; K. G. REID; P. J. TOBIN


Publisher
John Wiley and Sons
Year
2010
Weight
36 KB
Volume
29
Category
Article
ISSN
0931-7597

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