✦ LIBER ✦
ChemInform Abstract: SiH4-WF6 Gas-Phase Nucleated Tungsten as an Adhesion Layer in Blanket Chemical Vapor Deposition for Ultralarge Scale Integration.
✍ Scribed by K.-M. CHANG; T.-H. YEH; S.-W. WANG; C.-H. LI
- Publisher
- John Wiley and Sons
- Year
- 2010
- Weight
- 33 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0931-7597
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