ChemInform Abstract: Reactive Ion Etching (RIE) of InP/InAlGaAs/InGaAs Heterostructures.

✍ Scribed by CH. LEMM; ST. KOLLAKOWSKI; D. BIMBERG; K. JANIAK

• Publisher: John Wiley and Sons
• Year: 2010
• Weight: 31 KB
• Volume: 28
• Category: Article
• ISSN: 0931-7597
• DOI: 10.1002/chin.199752266