✦ LIBER ✦
ChemInform Abstract: Impact of Atomic Layer Deposition Chemistry to the Quality of High-Permittivity Metal Oxide Thin Solid Films
✍ Scribed by Kaupo Kukli; Mikko Ritala; Markku Leskela
- Publisher
- John Wiley and Sons
- Year
- 2008
- Weight
- 15 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0931-7597
No coin nor oath required. For personal study only.