✦ LIBER ✦
ChemInform Abstract: Formation of High-Quality Nitrided Silicon Dioxide Films Using Electron-Cyclotron Resonance Chemical Vapor Deposition with Nitrous Oxide and Silane.
✍ Scribed by D. LANDHEER; Y. TAO; J. E. HULSE; T. QUANCE; D.-X. XU
- Book ID
- 112037494
- Publisher
- John Wiley and Sons
- Year
- 2010
- Weight
- 28 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0931-7597
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