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ChemInform Abstract: Cl2-Based Dry Etching of Doped Manganate Perovskites: PrBaCaMnO3 and LaSrMnO3.

✍ Scribed by K. P. Lee; K. B. Jung; H. Cho; D. Kumar; S. V. Pietambaram; R. K. Singh; P. H. Hogan; K. H. Dahmen; Y. B. Hahn; S. J. Pearton

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