ChemInform Abstract: A Novel Process for Fabricating Conformal and Stable TiN-Based Barrier Films.

✍ Scribed by J. P. LU; W. Y. HSU; Q. Z. HONG; G. A. DIXIT; J. D. LUTTMER; R. H. HAVEMANN; L. K. MAGEL

• Publisher: John Wiley and Sons
• Year: 2010
• Weight: 27 KB
• Volume: 28
• Category: Article
• ISSN: 0931-7597
• DOI: 10.1002/chin.199714221