Chemically enhanced ion etching on refractory metal silicides: W L O'Brien et al, J Vac Sci Technol, A6, 1988, 1384–1387

• Book ID: 103473371
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 155 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90954-8