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Chemical vapour deposition of hafnium carbide and characterization of the deposited layers by secondary-neutral mass spectrometry

✍ Scribed by H.F. Ache; J. Goschnick; M. Sommer; G. Emig; G. Schoch; O. Wormer


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
338 KB
Volume
241
Category
Article
ISSN
0040-6090

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