Chemical vapor deposition using lanthanide β-diketone chelates with difluorodichloromethane

✍ Scribed by R. Amano; Y. Shiokawa; N. Sato; Y. Suzuki

• Book ID: 112676172
• Publisher: Springer
• Year: 1993
• Tongue: English
• Weight: 304 KB
• Volume: 172
• Category: Article
• ISSN: 1588-2780
• DOI: 10.1007/bf02040664