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Chemical Vapor Deposition of Gallium Nitride from the GaCl 3 +NH 3 System. Theoretical Study of the Structure and Thermodynamics of Potential Intermediates Formed in the Gaseous Phase

✍ Scribed by Kovács, Attila

Book ID
126869738
Publisher
American Chemical Society
Year
2002
Tongue
English
Weight
122 KB
Volume
41
Category
Article
ISSN
0020-1669

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