Chemical vapor deposition of carbon from methane at various pressures, partial pressures and substrate surface area/reactor volume ratios

✍ Scribed by W.G. Zhang; K. J. Hüttinger

• Book ID: 110368160
• Publisher: Springer
• Year: 2001
• Tongue: English
• Weight: 204 KB
• Volume: 36
• Category: Article
• ISSN: 0022-2461
• DOI: 10.1023/a:1017976400285