Chemical vapor deposition kinetics of tungsten from WCl6onto nickel plate at elevated temperatures

✍ Scribed by B. S. Chun; C. W. Won; H. Y. Sohn

• Book ID: 112814327
• Publisher: The Minerals, Metals & Materials Society
• Year: 1991
• Tongue: English
• Weight: 575 KB
• Volume: 22
• Category: Article
• ISSN: 1543-1916
• DOI: 10.1007/bf02654295