Chemical polishing of stainless steel for ultrahigh vacuum wall material

✍ Scribed by S.S. Inayoshi; Y. Sato; K. Saito; S. Tsukahara; Y. Hara; S. Amano; K. Ishizawa; T. Nomura; A. Shimada; M. Kanazawa

• Book ID: 104266258
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 559 KB
• Volume: 53
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(98)00422-9

✦ Synopsis

Chemical polishing (CP) was selected to develop a practical surface treatment for stainless steel for vacuum purposes. The outgassing properties of chemically polished samples being made of three industrial production forms of material; SUS304L plates, pipes, and bars were examined. The outgassing properties of the CP samples were almost the same as those of electrolytically polished (EP) samples, whereas the properties of the pipe, plate and bar material were different. As a final test, the results of a CP chamber were compared with those of an EP chamber after baking. The outgassing rate of CP chamber was the same as that of the EP one. Both samples with different surface treatments showed the same value, 1;10\ Pa m s, at the ultimate pressure at 28°C.