✦ LIBER ✦
Chemical, optical and tribological characterization of perfluoropolymer films as an anti-stiction layer in micro-mirror arrays
✍ Scribed by Kang-Kuk Lee; Nam-Goo Cha; Joon-Sung Kim; Jin-Goo Park; Hyung-Jae Shin
- Book ID
- 114085245
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 396 KB
- Volume
- 377-378
- Category
- Article
- ISSN
- 0040-6090
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