✦ LIBER ✦
Chemical-mechanical polishing of low-dielectric-constant spin-on-glasses: film chemistries, slurry formulation and polish selectivity
✍ Scribed by Y.-L Wang; C Liu; S.-T Chang; M.-S Tsai; M.-S Feng; W.-T Tseng
- Book ID
- 114086227
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 385 KB
- Volume
- 308-309
- Category
- Article
- ISSN
- 0040-6090
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