Chemical mechanical planarization operation via dynamic programming

✍ Scribed by Chia-Shui Lin; Yung-Chou Lee

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 987 KB
• Volume: 84
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2007.02.003