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Chemical foundations in understanding the step coverage problem in chemical vapour deposition using silane chemistry

✍ Scribed by Cristian Pavelescu

Book ID: 103430010
Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 268 KB
Volume: 213
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(92)90277-i

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