✦ LIBER ✦
Chemical Composition of AlN Thin Films Deposited at 523−723 K Using Dimethylethylamine Alane and Ammonia
✍ Scribed by Kidder,, J. N.; Yun, H. K.; Rogers,, J. W.; Pearsall, T. P.
- Book ID
- 120364893
- Publisher
- American Chemical Society
- Year
- 1998
- Tongue
- English
- Weight
- 91 KB
- Volume
- 10
- Category
- Article
- ISSN
- 0897-4756
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