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Chemical bevelling of InP-based structures by HBrH3PO4K2Cr2O7 solution

✍ Scribed by R. Srnanek; M.El Gomati; I. Novotny; D. Pudis

Book ID: 108342511
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 563 KB
Volume: 179
Category: Article
ISSN: 0022-0248
DOI: 10.1016/s0022-0248(97)00176-0

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