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Chemical and Structural Properties of Drug–protein Nanocomposites Prepared by Pulsed Laser Deposition from Conjugated Targets

✍ Scribed by Sanshiro Nagare; Jo Sagawa; Mamoru Senna

Publisher
Springer Netherlands
Year
2006
Tongue
English
Weight
420 KB
Volume
8
Category
Article
ISSN
1388-0764

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Zr-Al-O dielectric films have been deposited on Pt-coated silicon substrates and directly on n-type Si substrates, respectively, by pulsed laser deposition technique using a (ZrO ) (Al O ) ceramic target. The 2 0.5 2 3 0.5 Zr-Al-O films deposited in 20 Pa oxygen ambient at 300 8C substrate temperat