Chemical analysis of the interface between Al thin films and polymer surfaces pretreated with KrF-excimer laser radiation

✍ Scribed by D. A. Wesner; R. Weichenhain; W. Pfleging; H. Horn; E. W. Kreutz

• Publisher: Springer
• Year: 1997
• Tongue: English
• Weight: 57 KB
• Volume: 358
• Category: Article
• ISSN: 1618-2650
• DOI: 10.1007/s002160050397