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Charge transport and accumulation in dielectrics upon irradiation by an electron beam

✍ Scribed by A. I. Sergeev; N. I. Yagushkin

Book ID
112480826
Publisher
Springer
Year
1988
Tongue
English
Weight
403 KB
Volume
31
Category
Article
ISSN
1573-9228

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## Abstract Energetic beams of electrons and ions are widely used to probe the microscopic properties of materials. Irradiation with charged beams in scanning electron microscopes (SEM) and focused ion beam (FIB) systems may result in the trapping of charge at irradiation induced or pre‐existing de