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Charge pumping spectroscopy: HfSiON defect study after substrate hot electron injection

✍ Scribed by M. Toledano-Luque; L. Pantisano; R. Degraeve; M.B. Zahid; I. Ferain; E. San Andrés; G. Groeseneken; S. De Gendt


Book ID
104051742
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
699 KB
Volume
84
Category
Article
ISSN
0167-9317

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