Charge dissipation layer optimisation for nano-scale electron-beam lithography pattern definition onto diamond

✍ Scribed by Greer, A.I.M.; Moran, D.A.J.

• Book ID: 118070191
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 736 KB
• Volume: 29
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2012.07.003