Use of a low power, high frequency stabi
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S. Luge; J.A.C. Broekaert
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Article
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1996
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Elsevier Science
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English
โ 610 KB
The analytical figures of merit of a stabilized capacitive plasma using Ar and He as plasma gases in combination with electrothermal evaporation in a modified Perkin-Elmer HGA 500 graphite furnace are given. The plasma is operated at 27.12 MHz, at a power of 150 W and with a gas flow between 30 l/h