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Characterizations of the dc discharge plasma during chemical vapor deposition for diamond growth

โœ Scribed by Suzuki, Kazuhiro; Sawabe, Atsuhito; Inuzuka, Tadao


Book ID
121312617
Publisher
American Institute of Physics
Year
1988
Tongue
English
Weight
417 KB
Volume
53
Category
Article
ISSN
0003-6951

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