Characterization on phosphorus implanted low pressure chemical vapor deposited polycrystalline silicon: Giora Yaron. Solid-St. Electron., 22, 1017 (1979)

• Publisher: Elsevier Science
• Year: 1980
• Tongue: English
• Weight: 116 KB
• Volume: 20
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(80)90740-4