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Characterization of Young׳s modulus and fracture toughness of albite glass by different techniques

✍ Scribed by Sousa, Fábio J.P.; Dal Bó, Marcelo; Guglielmi, Paula O.; Janssen, Rolf; Hotza, Dachamir

Book ID
122144892
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
939 KB
Volume
40
Category
Article
ISSN
0272-8842

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SU-8 cantilever beams deposited on the polished sides or unpolished sides of silicon wafers were fabricated by MEMS and bulk micro-machining techniques. Bending tests were conducted to measure the Young's modulus and interface fracture toughness. The results indicate that the Young's modulus is incr