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Characterization of various insulators for possible use as low-k dielectrics deposited at temperatures below 200 °C

✍ Scribed by M. Vasilopoulou; A.M. Douvas; D. Kouvatsos; P. Argitis; D. Davazoglou


Book ID
108210521
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
194 KB
Volume
45
Category
Article
ISSN
0026-2714

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