Characterization of various alloying metal oxide nanoparticles embedded in HfOxNy as charge trapping nodes in nonvolatile memory devices

✍ Scribed by Chien-Wei Liu; Chin-Lung Cheng; Jin-Tsong Jeng; Bau-Tong Dai; Sung-Wei Huang

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 486 KB
• Volume: 85
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2008.05.003