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Characterization of vacancy-related defects introduced into silicon during heat treatment by deep-level transient spectroscopy and gamma-ray diffraction techniques

✍ Scribed by N. A. Sobolev,E. I. Shek,A. I. Kurbakov,E. E. Rubinova…


Book ID
118290325
Publisher
Springer
Year
1996
Tongue
English
Weight
386 KB
Volume
62
Category
Article
ISSN
1432-0630

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