Characterization of titanium nitride films and sputter target material by 14 MeV neutron activation analysis

✍ Scribed by S. Yegnasubramanian; R. F. Roberts; A. L. Helms; E. J. Canning

• Book ID: 112709556
• Publisher: Springer
• Year: 1987
• Tongue: English
• Weight: 339 KB
• Volume: 118
• Category: Article
• ISSN: 1588-2780
• DOI: 10.1007/bf02170467