✦ LIBER ✦
Characterization of TiN/TiSi2 bilayer formed by sputter deposition from a TiN0.4 alloy target and subsequent lamp annealing and its application to a contact system
✍ Scribed by Hiroki Nakamura; Kimihisa Fushimi
- Book ID
- 102819777
- Publisher
- John Wiley and Sons
- Year
- 1996
- Tongue
- English
- Weight
- 694 KB
- Volume
- 79
- Category
- Article
- ISSN
- 8756-663X
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