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Characterization of TiN films alternately treated with PVD and Cr ion implantation

✍ Scribed by K. Oda; H. Ohara; M. Tsujioka; T. Nomura

Book ID: 114194392
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 408 KB
Volume: 54
Category: Article
ISSN: 0254-0584
DOI: 10.1016/s0254-0584(98)00079-0

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