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Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends

✍ Scribed by Bosseboeuf, Alain; Petitgrand, Sylvain


Book ID
120182127
Publisher
Institute of Physics
Year
2003
Tongue
English
Weight
389 KB
Volume
13
Category
Article
ISSN
0960-1317

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