✦ LIBER ✦
Characterization of the damage produced by high-energy implantations into silicon by the thermal wave and RBS/channeling techniques
✍ Scribed by G.S. Sandhu; M. Anjum; S. Cherekdjian; B.K. Patnaik; N.R. Parikh; M.L. Swanson
- Book ID
- 113281517
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 434 KB
- Volume
- 59-60
- Category
- Article
- ISSN
- 0168-583X
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