✦ LIBER ✦
Characterization of Tantalum Films on Analytical Surfaces: Insights into Sputtering of Nonconductors in a Direct-Current Glow Discharge Using Secondary Cathodes
✍ Scribed by Wayne, David M.; Schulze, Roland K.; Maggiore, Carl; Cooke, D. Wayne; Havrilla, George
- Book ID
- 115364346
- Publisher
- Society for Applied Spectroscopy
- Year
- 1999
- Tongue
- English
- Weight
- 537 KB
- Volume
- 53
- Category
- Article
- ISSN
- 0003-7028
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