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Characterization of Silver Trimethylacetate Complexes with Tertiary Phosphines as CVD Precursors of Thin Silver Films

✍ Scribed by P. Piszczek; E. Szłyk; M. Chaberski; C. Taeschner; A. Leonhardt; W. Bała; K. Bartkiewicz


Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
639 KB
Volume
11
Category
Article
ISSN
0948-1907

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Volatile precursors of copper, silver and gold for chemical vapour deposition (CVD) of metallic layers are described. There is considerable research interest in CVD because it provides advantages such as selective deposition, control of film density and thickness, etc. over other physical deposition