Characterization of Silicon Wafers with Combined Photocarrier Radiometry and Free Carrier Absorption

✍ Scribed by Li, Bincheng; Huang, Qiuping; Ren, Shengdong

• Book ID: 121614393
• Publisher: Springer
• Year: 2013
• Tongue: English
• Weight: 356 KB
• Volume: 34
• Category: Article
• ISSN: 0195-928X
• DOI: 10.1007/s10765-013-1506-z