✦ LIBER ✦
Characterization of silicon dioxide deposited by low-temperature CVD using TEOS and ozone by monoenergetic positron beams
✍ Scribed by A. Uedono; L. Wei; S. Tanigawa; R. Suzuki; H. Ohgaki; T. Mikado; K. Fujino
- Book ID
- 112681876
- Publisher
- Springer
- Year
- 1994
- Tongue
- English
- Weight
- 254 KB
- Volume
- 84
- Category
- Article
- ISSN
- 0304-3843
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