✦ LIBER ✦
Characterization of SiC and Si3N4 coatings synthesized by means of inductive thermal plasma from disilane precursors
✍ Scribed by E. Bouyer; G. Schiller; M. Müller; R. H. Henne
- Publisher
- John Wiley and Sons
- Year
- 2001
- Tongue
- English
- Weight
- 265 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0268-2605
- DOI
- 10.1002/aoc.237
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