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Characterization of plasmas from a pulsed jet discharge for applications VUV spectroscopy and micromechanics

✍ Scribed by Phillips, H.; Kubodera, S.; Sauerbrey, R.; Tittel, F.K.; Wisoff, P.J.

Book ID: 117869128
Publisher: IEEE
Year: 1991
Tongue: English
Weight: 619 KB
Volume: 27
Category: Article
ISSN: 0018-9197
DOI: 10.1109/3.73546

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