Characterization of phosphosilicate thin films using confocal Raman microscopy

✍ Scribed by Matthews, Manyalibo J.; Harris, Alexander L.; Bruce, Allan J.; Cardillo, Mark J.

• Book ID: 119951607
• Publisher: American Institute of Physics
• Year: 2000
• Tongue: English
• Weight: 348 KB
• Volume: 71
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.1150591