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Characterization of PECVD grown porous SiO 2 thin films with potential application in an uncooled infrared detector

✍ Scribed by Yang, Pei-zhi; Liu, Li-ming; Mo, Jing-hui; Yang, Wen


Book ID
121470693
Publisher
Institute of Physics
Year
2010
Tongue
English
Weight
692 KB
Volume
25
Category
Article
ISSN
0268-1242

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