𝔖 Bobbio Scriptorium
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Characterization of NBS Standard Reference Material 2135 for sputter depth profile analysis

✍ Scribed by Fine, Joseph


Book ID
126864326
Publisher
AVS (American Vacuum Society)
Year
1985
Tongue
English
Weight
657 KB
Volume
3
Category
Article
ISSN
0734-2101

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Depth resolution in sputter depth profil
✍ Seah, M. P.; Spencer, S. J.; Gilmore, I. S.; Johnstone, J. E. πŸ“‚ Article πŸ“… 2000 πŸ› John Wiley and Sons 🌐 English βš– 318 KB πŸ‘ 2 views

Depth profiles have been made for a new batch of the certified reference material, BCR 261, of ~30 nm and 100 nm of anodic tantalum pentoxide layers on tantalum foil. Atomic force microscopy studies show that the preparation method traditionally used provides an excellent substrate root-mean-square