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Characterization of nanocrystalline diamond films implanted with nitrogen ions

โœ Scribed by Xu, Tao; Yang, Shengrong; Lu, Jinjun; Xue, Qunji; Li, Jingqi; Guo, Wantu; Sun, Yining


Book ID
123142325
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
319 KB
Volume
10
Category
Article
ISSN
0925-9635

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โœ C.R.B. Miranda; M. Ueda; M.R. Baldan; A.F. Beloto; N.G. Ferreira ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 778 KB

The influence of N 2 Plasma Immersion Ion Implantation (PIII) on undoped nanocrystalline diamond (NCD) films grown on silicon substrate by CVD process using a hot filament reactor was systematically studied. Before and after the implantation, NCD films were investigated using scanning electron micro